Light Science & Applications: Anneal-free ultra-low loss silicon nitride integrated photonics

We report the lowest loss waveguides and highest Q integrated ring resonators, 1.77 dB m−1 loss and 15 million Q, fabricated with an anneal-free silicon nitride photonic low-temperature process with a maximum processing temperature of 250 °C for all steps.

This significant advance in silicon nitride integrated photonics was published early this week in Light: Science and Applications.